Mine is a chunk of plywood with some gasket material in a square around the edge. Plate glass rests on the gasket, and a hole in the plywood connects to the vacuum. The trick is to use the minimum amount of vacuum needed - too much of course breaks the glass. Also, I use some cut up card stock to raise the pcb if it's thin, so less vacuum is need. About 3-5 inches should do. You can even get this much vacuum with a shop vac and a home made venturi, it's not much.
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Re: [Homebrew_PCBs] vacuum frame for UV exposure
2012-02-21 by DJ Delorie