thinking of all the possibilities, I know, the optics, X Y stage, UV (or other exposure method) controls, etc. that make up what looks very complex at first but inspecting the various elements I think, hmmm, a mask alignment system, either contact or projection, from bits gathered together could very well be assembled at much less than the cost of, say, a refurbished Karl Suss, Canon, etc. mask aligner. all I could find though was this pdf link... http://colossus.cs.rpi.edu/~azonenberg/papers/litho1.pdf Robert
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DIY Photomask Aligner
2012-02-05 by Robert