low cost, high speed (is 12 seconds with no heating appreciated?).
The disadvantage is that you need to take more care of the resist used.
the hcl is more agressive to some resists (especially resist pens).
But it works fine with photoresist...
stefan
On Thu, 16 Oct 2003 09:15:21 -0700 (PDT), M. <md30022@...> wrote:
>
> --- Stefan Trethan <stefan_trethan@...> wrote:
>
>> I changed to Hcl H2O2 process. there is no waste.
>> that's good.
>
> Hello Stefan,
>
> Besides no waste, what are the advantages to the HCl-
> H2)2 process?
>
> Best regards
>
> Marvin Dickens
>
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